Low-Temperature Solution-Based In2O3 Channel Formation for Thin-Film Transistors Using a Visible Laser-Assisted Combustion Process, IEEE Electron Device Letters ( Volume: 38, Issue: 9, September 2017)
Effects of H2 High-pressure Annealing on HfO2/Al2O3/In0.53Ga0.47As Capacitors: Chemical Composition and Electrical Characteristics, Scientific Reports volume 7, Article number: 9769 (2017)
Enhancement of the High Temperature Thermal Stability of Ni Based Silicide by Multiple Metal Layer Stacking, Nanoscience and Nanotechnology Letters, Volume 9, Number 4, April 2017, pp. 551-555(5)
About Prof.
프로필
현재 인하대학교 신소재공학과/제조혁신전문대학원 교수
현재 인하대학교 3D나노융합소자연구센터 소장
2012 ~ 2014 산업통상자원 R&D 전략기획단 반도체공정장비 PD
2004 ~ 2007 SEMATECH, Project Manager
1994 ~ 1999 대우자동차
교육
2004 University of Texas at Austin 재료공학 박사
1994 서울대학교 무기재료공학 석사
1992 서울대학교 무기재료공학 학사
주요 연구분야
Pulsed Id–Vg Methodology and Its Application to Electron-Trapping Characterization and Defect Density Profiling - Pulse Id-Vg 를 이용하여 high-k의 trap 측정 ( SEMATECH )
Bias polarity dependence of charge trapping behaviours in La-incorporated hafnium-based dielectric - High-k의 BTI model ( SEMATECH )
Application of Single-Pulse Charge Pumping Method on Evaluation of Indium Gallium Zinc Oxide Thin-Film Transistors - SPCP을 이용한 산화물반도체 trap 측정 ( 인하대학교 )
Electrical Characterization of the Self-Heating Effect in Oxide Semiconductor Thin-Film Transistors Using Pulse-Based Measurements - 산화물반도체 self heating ( 인하대학교 )