반도체소자, 나노소자, 반도체공정

최리노 교수

Rino Choi

About Lab.

내용 준비중

논문 및 연구 업적

  • Low-Temperature Solution-Based In2O3 Channel Formation for Thin-Film Transistors Using a Visible Laser-Assisted Combustion Process, IEEE Electron Device Letters ( Volume: 38, Issue: 9, September 2017)
  • Effects of H2 High-pressure Annealing on HfO2/Al2O3/In0.53Ga0.47As Capacitors: Chemical Composition and Electrical Characteristics, Scientific Reports volume 7, Article number: 9769 (2017)
  • Enhancement of the High Temperature Thermal Stability of Ni Based Silicide by Multiple Metal Layer Stacking, Nanoscience and Nanotechnology Letters, Volume 9, Number 4, April 2017, pp. 551-555(5)

About Prof.

프로필

  • 현재 인하대학교 신소재공학과/제조혁신전문대학원 교수
  • 현재 인하대학교 3D나노융합소자연구센터 소장
  • 2012 ~ 2014 산업통상자원 R&D 전략기획단 반도체공정장비 PD
  • 2004 ~ 2007 SEMATECH, Project Manager
  • 1994 ~ 1999 대우자동차

교육

  • 2004 University of Texas at Austin 재료공학 박사
  • 1994 서울대학교 무기재료공학 석사
  • 1992 서울대학교 무기재료공학 학사

주요 연구분야

  • Pulsed Id–Vg Methodology and Its Application to Electron-Trapping Characterization and Defect Density Profiling - Pulse Id-Vg 를 이용하여 high-k의 trap 측정 ( SEMATECH )
  • Bias polarity dependence of charge trapping behaviours in La-incorporated hafnium-based dielectric - High-k의 BTI model ( SEMATECH )
  • Application of Single-Pulse Charge Pumping Method on Evaluation of Indium Gallium Zinc Oxide Thin-Film Transistors - SPCP을 이용한 산화물반도체 trap 측정 ( 인하대학교 )
  • Electrical Characterization of the Self-Heating Effect in Oxide Semiconductor Thin-Film Transistors Using Pulse-Based Measurements - 산화물반도체 self heating ( 인하대학교 )